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Han's miniature stage Jul 04, 2022

Product features:

High speed: through direct drive to achieve the high precision positioning and high speed at the same time;

Ultra-long stroke: adopt the C-Lube self-lubricating linear guide in the form of butt joints to realize the ultra-long stroke that only the linear motor drive;

Built-in optical grating or magnetic grating feedback system, resolution 0.1μm, 0.5μm, 1μm, 5μm for a good choice;

Effective stroke of moving stage 100-2500mm for optional.


LMB100

Parameter


Effective stroke (mm)

100-1200

Max.force(N)

150

Continuous force(N)

15

Max.load(Kg)

5

Max.speed(mm/s)

700

Repeat accuracy (μm)

±0.6

Resolution (μm)

±0.1

Motion Parts Weight (kg)

3.5

miniature stage


Product features:

Compact structure, ultra-thin type ac motor module, which adopt the self-lubricating linear guide and small encoder to achieve ultra-thin thickness 30mm;

By direct drive and advanced servo technology to achieve the high speed stability ;

Effective stroke of mechanical stand moving platform 100-1200mm


LMB130

Parameter


Effective stroke (mm)

100-2200

Max.force(N)

150

Continuous force(N)

15

Max.load(Kg)

15

Max.speed(mm/s)

1500

Repeat accuracy (μm)

±1

Motion Parts Weight (kg)

1.8



miniature stage

Product features:

High accuracy, high precision machining and component assembly of motorized xyz stage to achieve a repeatability accuracy±0.5μm;

Steel structure;

High-precision polished mounting surface;

By configuring optical linear encoders on the X-axis and Z-axis for full closed-loop control; high resolution and high responsiveness have achieved high-speed positioning of linear stage motor.


LMB130

Parameter


Effective stroke (mm)

100-2500

Max.force(N)

900

Continuous force(N)

120

Max.load(Kg)

90

Max.speed(mm/s)

2000

Repeat accuracy (μm)

±1

Motion Parts Weight (kg)

4.5


Application:

1. Semiconductor industry and electronic components;

2. Medicine and life sciences in the medical industry;

3. Industrial quality assurance, optical metrology, such as surface inspection;

miniature stage


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