Products
XY 3-Axis Micro Linear Motion System
This system delivers coordinated XY three-axis motion in a compact form. Designed with micro linear motors for high accuracy and fast response. It supports synchronized multi-axis motion in micro-assembly and semiconductor processes. Offers low noise and minimal heat generation. Easily integrated into cleanroom and lab automation environments.
Brand:
Order(MOQ):
1
Product Detail
Characteristic:
Industry manufacturers choose linear stgae for the following reasons:
1, high speed, high acceleration and deceleration, high precision, greatly improve production efficiency and production quality;
2, the moving parts mainly adopt direct drive system, with high speed and high precision;
3. the stage adopts complex multi-axis synchronous control with strong mechanical coupling;
4, product reliability and stability, long time trouble-free operation;
Stage Specifications
| Model： | LMA65-10-10-T-XXX–A | |
| G01 | Grating feedback, resolution: 0.1μm | |
| G05 | Grating feedback, resolution: 0.5μm | |
| X aixs (lower aixs）specifications | ||
| Units | Value | |
| Continuous Force (Tmax） | N | 3.5 |
| Peak Force | N | 24.5 |
| Continuous Current (Tmax） | Arms | 0.6 |
| Peak Current (1S) | Arms | 4.2 |
| Max. Load | kg | 2.4 |
| Effective Stroke | mm | 10 |
| Resolution | μm | 0.1 |
| Max.Speed（1） | mm/s | 270 |
| Repeat accuracy | μm | ±0.5 |
| Y aixs (upper aixs）specifications | ||
| Continuous Force (Tmax） | N | 3.5 |
| Peak Force | N | 24.5 |
| Continuous Current (Tmax） | Arms | 0.6 |
| Peak Current (1S) | Arms | 4.2 |
| Max. Load | kg | 2.4 |
| Effective Stroke | mm | 10 |
| Resolution | μm | 0.1 |
| Max.Speed（1） | mm/s | 270 |
| Repeat accuracy | μm | ±0.5 |
| T aixs (rotation aixs）specifications | ||
| Continuous Force (25℃，±5%） | Nm | 0.062 |
| Peak Force | Nm | 0.46 |
| Continuous Current (Tmax） | Arms | 0.6 |
| Peak Current (1S) | Arms | 4.5 |
| Max. Load | kg | / |
| Max.Speed | Rpm | 120 |
| Repeat accuracy | arc sec | ±2 |
| Stage weight | kg | 1 |
Working environment temperature and humidity | 0-40℃、20-80%RH | |
Installation dimensions
Pitcure show
Laser Group Show
Our Company Show
Production Center Show
Packaging & Delivery
Packaging Details.: plywood packing
Port.: Shenzhen ( Sea / Air shipping, TNT, UPS, FedEx and DHL ect.)
Leading time: According to the order quantity, 10 days for the small order and 20 days for the bulk order
Sample
Contact Us
Experience our expert support, tailored solutions, and reliable global delivery.
Related Products
Features
Semiconductor ironless lienar motor is also called carbon fiber board motor with feature high speed, high acceleration, high thrust density and efficient heat dissipation, enabling stable high-performance operation in semiconductor applications.
Features
FE3 Series Torque motors are designed with industrial-grade quality, optimized for mass production and robust operation in demanding environments. Featuring high torque density, direct-drive architecture, and low maintenance, these motors deliver reliable, precise, and stable performance for industrial automation, robotics, machine tools, and semiconductor equipment. The design supports continuous operation under high load, making it ideal for large-scale industrial applications.
Features
FI Series Torque motors are designed with industrial-grade quality, optimized for mass production and robust operation in demanding environments. Featuring high torque density, direct-drive architecture, and low maintenance, these motors deliver reliable, precise, and stable performance for industrial automation, robotics, machine tools, and semiconductor equipment. The design supports continuous operation under high load, making it ideal for large-scale industrial applications.
Features
FI Series Torque motors are designed with industrial-grade quality, optimized for mass production and robust operation in demanding environments. Featuring high torque density, direct-drive architecture, and low maintenance, these motors deliver reliable, precise, and stable performance for industrial automation, robotics, machine tools, and semiconductor equipment. The design supports continuous operation under high load, making it ideal for large-scale industrial applications.
Features
This linear motor is specially designed for semiconductor packaging equipment, featuring high precision, fast response, and stable performance to meet the demanding requirements of advanced packaging processes.
Features
LSMFK series Water-Cooled Ironcore Linear Motors feature high thrust density 10000Nm and efficient heat dissipation, enabling stable high-performance operation in demanding applications.
Features
Water-Cooled Ironcore Linear Motors feature high thrust density and efficient heat dissipation, enabling stable high-performance operation in demanding applications.
Features
Water-Cooled Ironcore Linear Motors feature high thrust density and efficient heat dissipation, enabling stable high-performance operation in demanding applications.
Features
LSMD2 series double-sided magnet ironcore linear motor adopt gas cooling technology, high thrust with superior acceleration, cogging torque reduction technology, built-in thermal protection, and cancellation of unbalanced electromagnetic forces in demanding applications.