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Three-axis linear motor stage
High-precision three-axis linear motor stage for X, Y, Z linear motion. Ideal for semiconductor wafer dicing, die bonding, laser marking, cutting, engraving, and drilling. Delivers reliable accuracy and dynamic performance for industrial applications.
Brand:
Order(MOQ):
1
Product Detail
Feature:
1. High-Precision Optical Encoder – Equipped with Lamotion optical encoder (Renishaw encoder optional) for accurate position feedback.
2.Imported THK Linear Guides – Ensures smooth, stable, and reliable X/Y/Z axis motion.
3.Integrated ACS Motor-Drive System – Imported system delivers high-dynamic performance and precise control.
4.Ultra-High Repeatability – Achieves repeat accuracy up to ±1 µm within any 500 mm stroke.
5.Flexible Stroke Options – Effective stroke available from 100 mm to 500 mm to meet diverse application needs.
6.Comprehensive Support – Free product manual, 3D model, and technical documentation available for download.
Highlights:
· Precision Motion Control – Achieve ultra-accurate X/Y/Z linear movement with ±1 µm repeatability.
· High-Quality Components – Features Lamotion optical encoder (Renishaw optional), THK linear guides, and ACS integrated motor-drive system for superior performance.
· Flexible Stroke Options – Available in 100–500 mm stroke lengths to suit diverse industrial applications.
· Versatile Industrial Applications – Ideal for semiconductor wafer dicing, die bonding, wire bonding, laser marking, cutting, engraving, drilling, and scribing.
· Comprehensive Documentation – Free product manual and 3D model provided for easy integration and setup.
Application:
It is widely used in semiconductor wafer dicing、die bonders & wire bonders、laser marking、laser cutting、laser engraving、laser drilling、laser scribing.
Specification
| Item | X-axis | Y-axis | Z-axis |
| Limit Stroke (mm) | 270 | 270 | 10 |
| Load (kg) | 30 | 15 | 5 |
| Speed (mm/s) | 200 | 200 | 10 |
| Max.Acc.(m/s2) | 5 | 5 | 5 |
| Repeat accuracy (μm) | ±2 | ±2 | ±5 |
| Positioning Accuracy (μm) (after calibration) | ±3 | ±3 | ±10 |
| Straightness (μm) | ±3 | ±3 | ±3 |
| Verticality (μm) | ±5 | ||
| Encoder Resolution (μm) | 0.5 | 0.5 | / |
| Guide rail | THK | ||
| Photoelectric swtich | OMRN (NPN) | ||
Product Structure
Sample
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