Products
Semiconductor packaging equipment Linear Motor
Semiconductor ironless lienar motor is also called carbon fiber board motor with feature high speed, high acceleration, high thrust density and efficient heat dissipation, enabling stable high-performance operation in semiconductor applications.
Brand:
Order(MOQ):
1
Product Detail
Feature:
1. High thrust density
Ironcore design delivers large continuous force.
2. Superior cooling performance
Integrated gas-cooling significantly reduces temperature rise for stable long-term operation.
3. High dynamic response
Supports high speed, high acceleration, and frequent reciprocating motion.
4. Energy saving and low noise
Compared with air cooling, water cooling is more efficient and quieter, suitable for cleanroom environments.
5. Wide applicability
Maintains performance even under high power density or high temperature conditions.
Application:
These motors are widely used in semiconductor equipment, high-speed laser cutting machines, precision machine tools, and industrial automation systems, especially in high-speed handling scenarios that demand both stability and efficiency.
Specification
| Mover Spec.：LSMU910xxxx-x-H-AC | 101A-P | 102A-P | ||
| PERFORMANCE PARAMETERS | Symbol | Unit | ||
| Stroke | S | mm | 70 | 80 |
| Accelaration | a | m/s² | 200 | 200 |
| Continuous Force (Tmax） | Fc | N | 206 | 130 |
| Peak Force | Fp | N | 2062 | 1300 |
| Motor Constant | Km | N/Sqrt(W) | 21.4 | 16.6 |
| Max.Continuous Power Dissipation | Pc | W | 93 | 61 |
| Continuous Current (Tmax） | Ic | Arms | 2.5 | 2.5 |
| Peak Current (1S) | Ip | Arms | 25.0 | 25.0 |
| Force Constant (25℃，±5%） | Kf | N/Arms | 82.5 | 52.0 |
| Back EMF Constant (25℃，±5%） | Ke | Vrms/m/s | 27.5 | 17.3 |
| Electrical Resistance(25℃，±5%）P-P | R | Ω | 7.0 | 6.5 |
| Inductance(25℃，±20%）P-P | L | mH | 8.6 | 4.2 |
| Max Coil Temperature | Tmax | ℃ | 120 | 120 |
| Polar Distance (N-N) (360℃ Electrical cycle) | 2τ | mm | 60.0 | 48.0 |
| Magnetic Attraction | Fa | kN | 0.0 | 0.0 |
| Max.DC Bus Voltage | Ubus | V | 330 | 330 |
| Vmax,Fc@Ubus=310Vdc | Vmax,Fc | m/s | 4.1 | 6.5 |
| Vmax,Fp@Ubus=310Vdc | Vmax,Fp | m/s | 0.1 | 0.6 |
| Vmax,0@Ubus=310Vdc | Vmax,0 | m/s | 4.5 | 7.2 |
| Mover Mass | Mp | Kg | 0.7 | 0.5 |
| Stator Mass within unit length | Ms | Kg/m | 28 | 20 |
LSMU910101A-P-H-AC Dimension drawing
LSMU910102A-P-H-AC Dimension drawing
Sample
Contact Us
Experience our expert support, tailored solutions, and reliable global delivery.
Related Products
Features
Semiconductor ironless lienar motor is also called carbon fiber board motor with feature high speed, high acceleration, high thrust density and efficient heat dissipation, enabling stable high-performance operation in semiconductor applications.
Features
FE3 Series Torque motors are designed with industrial-grade quality, optimized for mass production and robust operation in demanding environments. Featuring high torque density, direct-drive architecture, and low maintenance, these motors deliver reliable, precise, and stable performance for industrial automation, robotics, machine tools, and semiconductor equipment. The design supports continuous operation under high load, making it ideal for large-scale industrial applications.
Features
FI Series Torque motors are designed with industrial-grade quality, optimized for mass production and robust operation in demanding environments. Featuring high torque density, direct-drive architecture, and low maintenance, these motors deliver reliable, precise, and stable performance for industrial automation, robotics, machine tools, and semiconductor equipment. The design supports continuous operation under high load, making it ideal for large-scale industrial applications.
Features
FI Series Torque motors are designed with industrial-grade quality, optimized for mass production and robust operation in demanding environments. Featuring high torque density, direct-drive architecture, and low maintenance, these motors deliver reliable, precise, and stable performance for industrial automation, robotics, machine tools, and semiconductor equipment. The design supports continuous operation under high load, making it ideal for large-scale industrial applications.
Features
This linear motor is specially designed for semiconductor packaging equipment, featuring high precision, fast response, and stable performance to meet the demanding requirements of advanced packaging processes.
Features
LSMFK series Water-Cooled Ironcore Linear Motors feature high thrust density 10000Nm and efficient heat dissipation, enabling stable high-performance operation in demanding applications.
Features
Water-Cooled Ironcore Linear Motors feature high thrust density and efficient heat dissipation, enabling stable high-performance operation in demanding applications.
Features
Water-Cooled Ironcore Linear Motors feature high thrust density and efficient heat dissipation, enabling stable high-performance operation in demanding applications.
Features
LSMD2 series double-sided magnet ironcore linear motor adopt gas cooling technology, high thrust with superior acceleration, cogging torque reduction technology, built-in thermal protection, and cancellation of unbalanced electromagnetic forces in demanding applications.