Products
Air bearing Stage
Our Air Bearing Stage delivers ultra-precise, contactless motion with minimal friction. Ideal for high-precision positioning and inspection in semiconductor and electronics manufacturing, it ensures stable, smooth, and repeatable performance.
Brand:
Order(MOQ):
1
Product Detail
Feature:
1.Extremely Low Friction Coefficient (~0.0005) – Ensures long service life, high stability, low noise, and exceptional manufacturing accuracy, while reducing driving power requirements.
2.Non-Contact Air Bearing Guide – Provides frictionless, smooth, and wear-free motion for high-precision positioning.
3.High Straightness & Flatness – Guarantees accurate movement and repeatable performance in semiconductor and electronics applications.
4.Long Travel Range (up to 1 meter) – Supports large-scale motion applications without sacrificing precision.
5.Nano-Level Micro-Step Resolution – Enables ultra-fine positioning and high-precision inspection tasks.
6.Closed-Loop Feedback with Grating Encoder – Ensures real-time monitoring, stable motion, and high repeatability for demanding manufacturing processes.
Highlights:
· Ultra-Low Friction Contactless Motion – Air bearing design reduces wear, noise, and driving power, ensuring long-lasting precision.
· High Precision & Stability – Nano-level resolution and superior straightness/flatness deliver consistent, repeatable positioning.
· Closed-Loop Feedback Control – Integrated grating encoder enables real-time monitoring and accurate motion control.
· Extended Travel Range – Supports large-scale movements up to 1 meter without sacrificing accuracy.
· Ideal for Semiconductor & Electronics Manufacturing – Perfect for inspection, measurement, and high-precision positioning tasks.
· Smooth & Reliable Operation – Non-contact air bearing guide ensures frictionless, wear-free motion for long-term applications.
Application:
1. Semiconductor manufacturing: lithography systems, wafer inspection equipment, and packaging equipment.
2. Precision metrology and inspection: ultra-precision coordinate measuring machines (CMM), roundness measuring instruments, cylindricity measuring instruments, and surface profilometers.
3. Optics and photonics: laser processing equipment and optical component inspection platforms.
4. Flat panel display (FPD) manufacturing: production and inspection equipment for LCD and OLED panels.
5. High-end additive manufacturing: industrial-grade 3D printers.
6. Biotechnology and life sciences: gene sequencers and high-throughput screening systems.
Specification
| Floating Stage Parameter | ||
| Parameter | Unit | Value |
| Continuous force | N | 72 |
| Peak force | N | 288 |
| Continuous current | Arms | 2.3 |
| Peak current | Arms | 9.2 |
| Resolution | μm | 0.05 |
| Repeat Accuracy | μm | ±0.1 |
| Positioning Accuracy | μm | ±0.5 |
| Straightness | μm | ±1 |
| Encoder Resolution | nm | 50 |
| Pitch | arcsec | 3 |
| Yaw | arcsec | 3 |
| Roll | arcsec | 3 |
| Effective Stroke | mm | 30 |
| Max. Speed | m/s | 0.1 |
| Acceleration | g | 1 |
| Max. Load | Kg | 5 |
Product Dimension
Sample
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